EE 212 - Electronics I

- Class of a clean-room (definition) and the reasons for its need.

- The air pressure inside the clean-room and the air flow.

- The kind of the air filters and the reasons for it.

- The different sections required in a class 100 clean-room. Explaining the processes or the type of the works done in each section.

- The required class for each section or processes.

- The types of the vacuum pumps and the related inlet and outlet connection setups.

- The kind of the used equipment and their function, location, and the installation setup in the clean room.

- The required process steps and equipment used for patterning processes in particular.